| Call Number |
:
|
537.622 T374 |
| Type of Document |
:
|
Monograph (Book) |
| Language of Doc. |
:
|
EN |
| Title |
:
|
The physics of VLSI , Xerox , Palo Alto , 1984 |
| Author(s) |
:
|
Knights
John C. |
| Publisher |
:
|
American Institute of physics |
| Publication Year |
:
|
1984 |
| Publication Place |
:
|
New York |
| Physical description |
:
|
xiii,292 |
| ISBN |
:
|
0-88318-321-8 |
| Notes |
:
|
Includes index |
| Subject Area |
:
|
Physics |
| Subject Headings |
:
|
-- Silicates -- Lithography -- Semiconductors -- Electronicinstruments -- Packaging -- Design -- Conferences -- Proceedings |
| Item | Barcode | Status | Due Date | Location | Media Type |
| 44722 | -- | -- | CIRCULATION |