| Call Number |
:
|
539.7222 O81 |
| Type of Document |
:
|
Monograph (Book) |
| Language of Doc. |
:
|
EN |
| Title |
:
|
OSA Proceeding on Soft X-Ray Projection lithography |
| Author(s) |
:
|
Bokor
Jeffery |
| Publisher |
:
|
Optical Society of America |
| Publication Year |
:
|
1991 |
| Publication Place |
:
|
Washington |
| Physical description |
:
|
152 |
| ISBN |
:
|
1-55752-187-5 |
| Subject Area |
:
|
Physics |
| Subject Headings |
:
|
-- Physics -- Metrology |
| Item | Barcode | Status | Due Date | Location | Media Type |
| 62792 | -- | -- | CIRCULATION |