| Call Number |
:
|
539.7222 O81 |
| Type of Document |
:
|
Monograph (Book) |
| Language of Doc. |
:
|
EN |
| Title |
:
|
OSA proceeding on Soft X-Ray projection lithography |
| Author(s) |
:
|
Hawryluk
Andrew.M Stulen Richard.h |
| Publisher |
:
|
Optical Society of America |
| Publication Year |
:
|
1993 |
| Publication Place |
:
|
Washington |
| Physical description |
:
|
226 |
| ISBN |
:
|
1-55752-304-5 |
| Subject Area |
:
|
Physics |
| Subject Headings |
:
|
-- Physics -- Proceedings -- Metrology |
| Item | Barcode | Status | Due Date | Location | Media Type |
| 62787 | -- | -- | CIRCULATION |