| Call Number |
:
|
621.3815 D798 |
| Type of Document |
:
|
Monograph (Book) |
| Language of Doc. |
:
|
EN |
| Title |
:
|
Dry etching for microelectronics |
| Author(s) |
:
|
Pawel Ronald A. |
| Publisher |
:
|
North-Holland physics |
| Publication Year |
:
|
1984 |
| Publication Place |
:
|
Amsterdam |
| Physical description |
:
|
xi;299 |
| ISBN |
:
|
0-444-86905-0 |
| Notes |
:
|
Inculdes bibliography |
| Subject Area |
:
|
Engineering |
| Subject Headings |
:
|
-- Microelectronics -- Alloys -- Metals -- Semiconductors -- Aluminium |
Item Information :
| Item | Barcode | Status | Due Date | Location | Media Type |
| 51755 | -- | -- | CIRCULATION |